JEOL IT510 LV SEM

A variable pressure SEM fitted with a tungsten filament and analytical capabilities.
The JEOL IT510 SEM

Technical specification

Resolution: 3.0 nm (@ 30 kV)
Magnification: 5 - 300,000x
Acceleration Voltage: 0.3 - 30 kV
Vacuum Mode: High vacuum, low vacuum/variable pressure

Equipment specification

  • OI Xplore 30 mm2 EDX
  • JEOL Low Vacuum Secondary Electron Detector

Available techniques